Imec, ASML and TSMC develop integration route for 2D-material based nFETs and pFETs.
AI Summary
Imec, ASML and TSMC have come up with a novel, robust and scalable 300mm integration route for 2D-material based n and pFETs. For the first time, scaled nFETs (implementing MoS2 ... The post Imec, ASML and TSMC develop integration route for 2D-material based nFETs and pFETs.
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